Depth Profile Analyses with Sub 100-nm Depth Resolution of a Metal Thin Film by Femtosecond – Laser Ablation – Inductively Coupled Plasma – Time-of-Flight Mass Spectrometry
In this publication, Debora Käser and coworkers demonstrate an innovative way to achieve a homogenized beam from a femtosecond laser beam in a laser ablation/ icpTOF prototype system. This homogenization scheme leads to uniform ablation within the laser spot and to improved depth resolution of laser ablation – inductively coupled plasma – time-of-flight mass spectrometry (LA-ICP-TOFMS).
When analyzing the depth profile of a Cr/Ni metal thin film, the depth resolution was found to be better than 100 nm. This resolution suggests LA-ICP-TOFMS could be a complementary technology to secondary ion mass spectrometry or glow discharge optical emission spectrometry for depth profiling due to its higher speed and lateral resolution in combination with high sensitivity.