FIBSIMS: A Review of Secondary Ion Mass Spectrometry for Analytical Dual Beam Focused Ion Beam Instruments
Pillatsch, L.; Östlund, F.; Michler, J.
Progress in Crystal Growth and Characterization of Materials, 2019
This review article, from TOFWERK and Empa, summarizes recent progress in the coupling of secondary ion mass spectrometers to focused ion beam microscopes. Along with the recent developments, the authors discuss the physical limits of resolution inherent in the FIB-SIMS technique. The pros and cons of different mass analyzer designs are also considered, noting that that a time-of-flight mass analyzer, like the fibTOF, ensures that all masses are collected simultaneously.
Practical tips for operating conditions are given, together with a discussion of the complementarity of EDX and FIB-SIMS. Lastly, case studies taken from several application areas including materials science, cultural heritage and geochemistry are investigated.