{"id":27557,"date":"2021-11-17T12:56:49","date_gmt":"2021-11-17T19:56:49","guid":{"rendered":"https:\/\/www.tofwerk.com\/?p=27557"},"modified":"2024-08-09T06:55:03","modified_gmt":"2024-08-09T12:55:03","slug":"yuanzicengduiji","status":"publish","type":"post","link":"https:\/\/www.tofwerk.com\/ja\/monitoring-atomic-layer-deposition-processes\/","title":{"rendered":"Semicon Process\u6eb6\u6db2\u3092\u7528\u3044\u305f\u539f\u5b50\u5c64\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u306e\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u3068\u7279\u6027\u8a55\u4fa1"},"content":{"rendered":"

\u30d9\u30f3\u30fb\u30d9\u30f3\u30b5\u30a6\u30e9
TOFWERK \u30b9\u30a4\u30b9<\/p>\n\n\n\n

\u306f\u3058\u3081\u306b<\/h2>\n\n\n\n

\u539f\u5b50\u5c64\u5806\u7a4d\u6cd5\uff08ALD\uff09\u306f\u3001\u3055\u307e\u3056\u307e\u306a\u8584\u819c\u6750\u6599\u306b\u5bfe\u3059\u308b\u6a19\u6e96\u7684\u306a\u6280\u8853\u3068\u3057\u3066\u6025\u901f\u306b\u666e\u53ca\u3057\u3066\u304a\u308a\u3001\u534a\u5c0e\u4f53\u5206\u91ce\u3067\u306f\u4e0d\u53ef\u6b20\u306a\u30c4\u30fc\u30eb\u3068\u306a\u3063\u3066\u3044\u308b\u3002ALD\u306f\u3001\u8907\u96d1\u306a3\u6b21\u5143\u5f62\u72b6\u3092\u6301\u3064\u57fa\u677f\u4e0a\u3067\u3055\u3048\u3001\u8584\u819c\u306e\u539a\u3055\u3068\u9069\u5408\u6027\u3092\u30b5\u30d6\u30ca\u30ce\u30e1\u30fc\u30c8\u30eb\u5358\u4f4d\u3067\u5236\u5fa1\u3059\u308b\u305f\u3081\u306b\u3001\u30b7\u30fc\u30b1\u30f3\u30b7\u30e3\u30eb\u30fb\u30e2\u30fc\u30c9\u3067\u306e2\u3064\u306e\u6c17\u4f53\u53cd\u5fdc\u4f53\u306e\u81ea\u5df1\u9650\u5b9a\u7684\u306a\u8868\u9762\u53cd\u5fdc\u306b\u4f9d\u5b58\u3057\u3066\u3044\u308b\u3002\u6210\u819c\u3055\u308c\u305f\u8584\u819c\u306e\u7269\u7406\u5316\u5b66\u7684\u7279\u6027\u306f\u3001\u4e3b\u306b\u8868\u9762\u5206\u89e3\u53cd\u5fdc\u3068\u6210\u9577\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u4f9d\u5b58\u3059\u308b\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u3053\u308c\u3089\u306e\u30d7\u30ed\u30bb\u30b9\u3092\u5b8c\u5168\u306b\u7279\u6027\u5316\u3057\u3066\u7406\u89e3\u3057\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u30b5\u30a4\u30af\u30eb\u3092\u77ed\u7e2e\u3057\u3001\u751f\u7523\u74b0\u5883\u3067\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u306e\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u3068\u5236\u5fa1\u3092\u63d0\u4f9b\u3059\u308b\u8a08\u6e2c\u30c4\u30fc\u30eb\u3092\u6d3b\u7528\u3059\u308b\u3053\u3068\u304c\u91cd\u8981\u3067\u3042\u308b\u3002.<\/p>\n\n\n\n

ALD\u7528Semicon Process\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3<\/h2>\n\n\n\n

\u3053\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30ce\u30fc\u30c8\u3067\u306f\u3001\u539f\u5b50\u5c64\u84b8\u7740\u88c5\u7f6e\uff08SC-1\u3001\u30b9\u30a4\u30b9\u30fb\u30af\u30e9\u30b9\u30bf\u30fc\u793e\u88fd\u3001\u30c8\u30a5\u30fc\u30f3\u3001\u30b9\u30a4\u30b9\uff09\u306bTOFWERK Semicon Process\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u3092\u7d71\u5408\u3057\u3001\u8584\u819c\u88fd\u9020\u30d7\u30ed\u30bb\u30b9\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u3059\u308b\u65b9\u6cd5\u3092\u7d39\u4ecb\u3057\u307e\u3059\u3002Semicon Process\u30a2\u30ca\u30e9\u30a4\u30b6\u30fc\u306f\u3001\u3059\u3079\u3066\u306e\u30a4\u30aa\u30f3\u5316\u5206\u5b50\u3092\u540c\u4f4d\u4f53\u5206\u89e3\u80fd\u3067\u540c\u6642\u306b\u691c\u51fa\u3057\u307e\u3059\u30025<\/sup> \u30c0\u30a4\u30ca\u30df\u30c3\u30af\u30fb\u30ec\u30f3\u30b8\u3001\u8cea\u91cf\u30b9\u30da\u30af\u30c8\u30eb\u53d6\u5f97\u30ec\u30fc\u30c8\u306f\u6700\u59271kHz\u3002\u5316\u5b66\u30c7\u30fc\u30bf\u53d6\u5f97\u306f\u305d\u306e\u5834\u3067\u884c\u308f\u308c\u308b\u305f\u3081\u3001\u9069\u7528\u3055\u308c\u305f\u84b8\u7740\u30d1\u30e9\u30e1\u30fc\u30bf\u30fc\u306e\u7d50\u679c\u3092\u5373\u5ea7\u306b\u30e2\u30cb\u30bf\u30fc\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u6e29\u5ea6\u3084\u30d1\u30eb\u30b9\uff0f\u30d1\u30fc\u30b8\u6642\u9593\u306a\u3069\u306e\u30d7\u30ed\u30bb\u30b9\u5b9f\u9a13\u6761\u4ef6\u3092\u5373\u5ea7\u306b\u4fee\u6b63\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002 \u3055\u3089\u306b\u3001\u6700\u9069\u6761\u4ef6\u304b\u3089\u306e\u9038\u8131\u3084\u88c5\u7f6e\u306e\u6545\u969c\u3082\u691c\u51fa\u3055\u308c\u308b\u3002\u3053\u306eSemicon Process\u30a2\u30ca\u30e9\u30a4\u30b6\u30fc\u306b\u3088\u308bin-situ\u53d6\u5f97\u306f\u3001\u5927\u5e45\u306a\u9045\u5ef6\u3092\u4f34\u3046\u6b7b\u5f8c\uff08ex-situ\uff09\u306e\u5316\u5b66\u7684\u30fb\u69cb\u9020\u7684\u7279\u6027\u8a55\u4fa1\u6cd5\u306b\u6bd4\u3079\u3066\u5927\u304d\u306a\u5229\u70b9\u304c\u3042\u308a\u307e\u3059\u3002.<\/p>\n\n\n\n

\u5b9f\u9a13\u30bb\u30c3\u30c8\u30a2\u30c3\u30d7<\/h2>\n\n\n\n

ALD\u30d7\u30ed\u30bb\u30b9\u306f\u3001ALD\u3068PVD\u3092\u7d44\u307f\u5408\u308f\u305b\u305f\u65b0\u3057\u3044\u30b3\u30f3\u30d1\u30af\u30c8\u30af\u30e9\u30b9\u30bf\u30fc\u30b7\u30b9\u30c6\u30e0SC-1\u3092\u7528\u3044\u3066\u884c\u308f\u308c\u305f\u3002\u3053\u306e\u7814\u7a76\u3067\u306f\u3001SC-1\u306eALD\u30e2\u30b8\u30e5\u30fc\u30eb\u306e\u307f\u3092\u4f7f\u7528\u3057\u305f\u3002\u57fa\u677f\u6e29\u5ea6\u306f120\u2103\u306b\u8a2d\u5b9a\u3057\u305f\u3002\u30c8\u30ea\u30e1\u30c1\u30eb\u30a2\u30eb\u30df\u30cb\u30a6\u30e0\u3001Al\uff08CH3<\/sub>)3<\/sub> (TMA\u3001\u7d14\u5ea698 %\u3001Strem\u793e\u88fd\uff09\u304a\u3088\u3073DI H2<\/sub>O\u3092\u4f7f\u7528\u3057\u305f\u3002\u3053\u308c\u30892\u3064\u306e\u30ac\u30b9\u524d\u99c6\u4f53\u306f\u3001Al2<\/sub>O3<\/sub>, \u30e2\u30c7\u30ebALD\u30b7\u30b9\u30c6\u30e0\u3067\u3042\u308b\u3002\u3053\u306e\u30d7\u30ed\u30bb\u30b9\u306e\u5316\u5b66\u7684\u6027\u8cea\u306f\u3001\u591a\u304f\u306e\u7814\u7a76\u3067\u5e83\u304f\u5206\u6790\u3055\u308c\u3066\u304a\u308a\u3001\u672c\u7814\u7a76\u3067\u793a\u3057\u305f\u7d50\u679c\u306e\u8a55\u4fa1\u306b\u3082\u5f79\u7acb\u3063\u305f\u3002\u4e21\u65b9\u306e\u524d\u99c6\u4f53\u306f\u5ba4\u6e29\u3067\u84b8\u7740\u30c1\u30e3\u30f3\u30d0\u30fc\u306b\u4f9b\u7d66\u3055\u308c\u300199.9995%\u7d14\u5ea6\u306e\u30a2\u30eb\u30b4\u30f3\uff08Air Liquide\u88fd\uff09\u304c\u30d1\u30fc\u30b8\u30ac\u30b9\u3068\u3057\u3066\u4f7f\u7528\u3055\u308c\u305f\u3002.<\/p>\n\n\n\n

\u5b9f\u9a13\u306f20\u56de\u306eALD\u30b5\u30a4\u30af\u30eb\u3067\u69cb\u6210\u3055\u308c\u305f\u3002\u5404\u30b5\u30a4\u30af\u30eb\u306b\u306f\u300150ms\u306eTMA\u30d1\u30eb\u30b9\u306830ms\u306eH2<\/sub>O\u3092Ar\u30ad\u30e3\u30ea\u30a2\u30ac\u30b9\u306a\u3057\u3067\u4f7f\u7528\u3057\u3001\u76ee\u7684\u306e\u30ac\u30b9\u306e\u307f\u304c\u30c1\u30e3\u30f3\u30d0\u30fc\u306b\u5c0e\u5165\u3055\u308c\u308b\u3088\u3046\u306b\u3057\u305f\u3002\u30ac\u30b9\u524d\u99c6\u4f53\u30d1\u30eb\u30b9\u306e\u9593\u306b\u306f\u300130\u79d2\u9593\u306b\u308f\u305f\u308a50sccm\u306e\u30a2\u30eb\u30b4\u30f3\u30fb\u30ac\u30b9\u30fb\u30d1\u30fc\u30b8\u304c\u884c\u308f\u308c\u305f\u3002.<\/p>\n\n\n\n

\u7d50\u679c<\/h2>\n\n\n\n

ALD\u3067\u306f\u3001\u9806\u6b21\u5c0e\u5165\u3055\u308c\u308b\u30ac\u30b9\u524d\u99c6\u4f53\u3068\u8868\u9762\u3068\u306e\u53cd\u5fdc\u306b\u3088\u308a\u3001\u56f31\u306b\u793a\u3059\u3088\u3046\u306a\u526f\u751f\u6210\u7269\u304c\u653e\u51fa\u3055\u308c\u308b\u3002\u3053\u308c\u3089\u306e\u526f\u751f\u6210\u7269\u306e\u5316\u5b66\u7684\u6027\u8cea\u3068\u91cf\u306f\u3001\u57fa\u672c\u7684\u306a\u53cd\u5fdc\u30e1\u30ab\u30cb\u30ba\u30e0\u306b\u95a2\u3059\u308b\u91cd\u8981\u306a\u60c5\u5831\u3092\u63d0\u4f9b\u3057\u3001\u5de5\u696d\u7684\u898f\u6a21\u3067\u306e\u4fe1\u983c\u6027\u3068\u518d\u73fe\u6027\u306e\u9ad8\u3044\u30d7\u30ed\u30bb\u30b9\u306e\u305f\u3081\u306e\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u30fb\u30d7\u30ed\u30c8\u30b3\u30eb\u306e\u958b\u767a\u306b\u793a\u5506\u3092\u4e0e\u3048\u308b\u3002.<\/p>\n\n\n

\n
\"\"<\/a>
\u56f31.<\/strong> \u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u3068\u3001\u305d\u306e\u30d7\u30ed\u30bb\u30b9\u306b\u95a2\u4e0e\u3059\u308b\u5168\u5206\u5b50\u306e\u4e26\u5217\u691c\u51fa\u306e\u6a21\u5f0f\u56f3\u3002\u4f8b\u3068\u3057\u3066 TMA+H2<\/sub>O<\/em><\/em> \u6c88\u6bbf, TMA\u306f\u8868\u9762\u306eOH\u30b5\u30a4\u30c8\u3068\u53cd\u5fdc\u3057\u3001CH\u3092\u5f62\u6210\u3059\u308b\u30024<\/sub>, \u30d1\u30fc\u30b8\u5de5\u7a0b\u306e\u5f8c\u3001H2<\/sub>O\u306f\u30e1\u30c1\u30eb\u8868\u9762\u3068\u53cd\u5fdc\u3057\u3001\u4e3b\u306bCH\u3092\u751f\u6210\u3059\u308b\u30024<\/sub> \u306e\u3088\u3046\u306a\u4e8c\u6b21\u751f\u6210\u7269\u306b\u52a0\u3048\u3066\u3001AlOH(CH3<\/sub>)2<\/sub>.<\/em><\/figcaption><\/figure>\n<\/div>\n\n\n

\u6211\u3005\u306f\u3001Al2<\/sub>O3  <\/sub>TMA\u3068H\u3092\u7528\u3044\u305f\u6790\u51fa2<\/sub>\u3067\u6e2c\u5b9a\u3055\u308c\u305f\u4fe1\u53f7\u5206\u5e03\u306b\u57fa\u3065\u3044\u3066\u3001O\u3092\u7279\u5fb4\u4ed8\u3051\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u3002 m\/Q <\/em>= 16 Th, 18 Th, 27 Th, 40 Th\u3067\u3001TMA Al (27 Th)\u3001H2<\/sub>O (18 Th)\u3001\u526f\u751f\u6210\u7269CH4<\/sub> (16Th)\u3068Ar\u30ad\u30e3\u30ea\u30a2\u30ac\u30b9(40Th)\u304b\u3089\u691c\u51fa\u3055\u308c\u307e\u3057\u305f\u3002\u3057\u304b\u3057\u3001\u56f32\u306b\u793a\u3059\u3088\u3046\u306b\u3001\u3059\u3079\u3066\u306e\u8cea\u91cf\u3092\u540c\u6642\u306b\u691c\u51fa\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u308b\u305f\u3081\u3001\u3053\u308c\u307e\u3067\u691c\u51fa\u3055\u308c\u306a\u304b\u3063\u305f\u526f\u751f\u6210\u7269\u3092\u89b3\u5bdf\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001Semicon Process\u30a2\u30ca\u30e9\u30a4\u30b6\u30fc\u306e\u9ad8\u3044\u8cea\u91cf\u5206\u89e3\u80fd\u3068\u7cbe\u5ea6\u304c\u306a\u3051\u308c\u3070\u3001\u540c\u5b9a\u3059\u308b\u3053\u3068\u306f\u56f0\u96e3\u3067\u3042\u3063\u305f\u3067\u3057\u3087\u3046\u3002.<\/p>\n\n\n

\n
\"\"<\/a>
\u56f32. <\/strong>20\u56de\u306eTMA\u3068H2O\u30b5\u30a4\u30af\u30eb\u304b\u3089\u306a\u308bALD\u30d7\u30ed\u30bb\u30b9\u5168\u4f53\u3067\u5f97\u3089\u308c\u305f\u30de\u30b9\u30b9\u30da\u30af\u30c8\u30eb\uff1aa)\u5168\u30de\u30b9\u30b9\u30da\u30af\u30c8\u30eb\uff1am\/Q < 290 Th\u306e\u30d7\u30ed\u30bb\u30b9\u53cd\u5fdc\u7269\u306e\u5834\u5408\u306b\u6700\u3082\u5f37\u3044\u30b7\u30b0\u30ca\u30eb\u304c\u89b3\u6e2c\u3055\u308c\u305f\u304c\u3001\u3088\u308a\u91cd\u3044\u30a4\u30aa\u30f3\u3082\u691c\u51fa\u3055\u308c\u305f\u3002\u5bfe\u6570\u76ee\u76db\u308a\u306b\u6ce8\u610f\u3002.<\/em><\/figcaption><\/figure>\n<\/div>\n\n\n

Semicon Process\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u304c\u63d0\u4f9b\u3059\u308b\u3082\u3046\u4e00\u3064\u306e\u91cd\u8981\u306a\u7279\u5fb4\u306f\u3001\u56f33\u306b\u793a\u3059\u3088\u3046\u306b\u3001\u30ea\u30a2\u30af\u30bf\u30fc\u5185\u306b\u5b58\u5728\u3059\u308b\u3059\u3079\u3066\u306e\u5316\u5b66\u7a2e\u306e\u6642\u9593\u5909\u5316\u3092\u30e2\u30cb\u30bf\u30fc\u3067\u304d\u308b\u3053\u3068\u3067\u3042\u308b\u3002 \u56f34\u306f 27<\/sup>Al\u4fe1\u53f7\u306e\u5206\u5e03\u3001\u3059\u306a\u308f\u3061 27<\/sup>TMA\u30d0\u30eb\u30d6\u304c\u958b\u3044\u3066\u3044\u308b\u3068\u304d\u306eAl\u4fe1\u53f7\u306e\u30d4\u30fc\u30af\u632f\u5e45\u3068\u3001\u305d\u306e\u534a\u5024\u5e45\uff08FWHM\uff09\u3002\u3053\u308c\u30892\u3064\u306e\u5024\u306e\u5909\u52d5\u306f\u3001\u4f9b\u7d66\u3055\u308c\u305fTMA\u306e\u91cf\u304c\u30b5\u30a4\u30af\u30eb\u9593\u3067\u5909\u5316\u3057\u305f\u3053\u3068\u3092\u793a\u3057\u3066\u3044\u308b\u3002ALD\u30d7\u30ed\u30bb\u30b9\u306f\u81ea\u5df1\u5236\u9650\u7684\u3067\u3042\u308a\u3001TMA\u524d\u99c6\u4f53\u306e\u904e\u5270\u306f\u5c64\u539a\u306e\u5897\u52a0\u3092\u8a98\u767a\u3057\u306a\u3044\u304c\u3001\u524d\u99c6\u4f53\u6d88\u8cbb\u91cf\u306f\u6700\u9069\u5316\u3067\u304d\u308b\u3002\u5bfe\u7167\u7684\u306b\u3001\u524d\u99c6\u4f53\u306e\u91cf\u304c\u5c11\u306a\u3044\u3068\u3001\u90e8\u5206\u7684\u306a\u5358\u5c64\u6790\u51fa\u3068\u306a\u308a\u3001\u30d8\u30c6\u30ed\u69cb\u9020\u306e\u6790\u51fa\u304c\u76ee\u7684\u306e\u5834\u5408\u3001\u8868\u9762\u5f62\u614b\u304c\u7c97\u304f\u306a\u308a\u3001\u754c\u9762\u304c\u7406\u60f3\u7684\u3067\u306a\u304f\u306a\u308b\u3002\u3053\u306e\u3088\u3046\u306b\u3001Semicon Process\u30a2\u30ca\u30e9\u30a4\u30b6\u30fc\u3092\u7528\u3044\u3066\u53ef\u80fd\u306b\u306a\u308b\u3001\u30b5\u30a4\u30af\u30eb\u3054\u3068\u306eALD\u30d7\u30ed\u30bb\u30b9\u306e\u518d\u73fe\u6027\u3092\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u5b9a\u91cf\u5316\u3059\u308b\u3053\u3068\u306f\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\uff08R&D\uff09\u3068\u88fd\u9020\u306e\u4e21\u65b9\u306b\u304a\u3044\u3066\u91cd\u8981\u3067\u3042\u308b\u3002.<\/p>\n\n\n

\n
\"\"<\/a>
\u56f33.<\/strong> ALD\u30c1\u30e3\u30f3\u30d0\u30fc\u5185\u306b\u7d71\u5408\u3055\u308c\u305fin situ Semicon Process\u30a2\u30ca\u30e9\u30a4\u30b6\u30fc\u306f\u3001\u751f\u6210\u7269\u3084\u526f\u751f\u6210\u7269\u3092\u542b\u3080ALD\u30d7\u30ed\u30bb\u30b9\u306b\u53c2\u52a0\u3059\u308b\u3059\u3079\u3066\u306e\u5143\u7d20\u3068\u5206\u5b50\u306e\u6642\u9593\u5909\u5316\u3092\u30e2\u30cb\u30bf\u30fc\u3059\u308b\u30e6\u30cb\u30fc\u30af\u306a\u6a5f\u4f1a\u3092\u63d0\u4f9b\u3057\u307e\u3059\u3002H2O\uff08\u9752\u7dda\uff09\u3068Al\uff08\u8d64\u7dda\uff09\u306e\u30b7\u30b0\u30ca\u30eb\u306f\u30ac\u30b9\u524d\u99c6\u4f53\u3092\u8868\u3057\u3001N\uff08\u7dd1\u7dda\uff09\u3068Ar\uff08\u7d2b\u7dda\uff09\u306e\u30b7\u30b0\u30ca\u30eb\u306f\u6210\u819c\u30c1\u30e3\u30f3\u30d0\u30fc\u306e\u771f\u7a7a\u72b6\u614b\u306e\u60c5\u5831\u3092\u63d0\u4f9b\u3057\u307e\u3059\u300220\u30b5\u30a4\u30af\u30eb\u306e\u84b8\u7740\u30d7\u30ed\u30bb\u30b9\u306e\u6642\u9593\u767a\u5c55\uff08a\uff09\u3068\u3001\u6700\u521d\u306e3\u30b5\u30a4\u30af\u30eb\u306eTMA\u3068H2O\u306e\u62e1\u5927\uff08b\uff09\u3092\u793a\u3059\u3002pgaTOF\u30c7\u30fc\u30bf\u306f\u3001\u3088\u308a\u3088\u304f\u53ef\u8996\u5316\u3059\u308b\u305f\u3081\u306b1\u306b\u6b63\u898f\u5316\u3057\u305f\u3002.<\/em><\/figcaption><\/figure>\n<\/div>\n\n
\n
\"\"<\/a>
\u56f34.<\/strong> \u9023\u7d9a\u3057\u305fTMA\u6ce8\u5165\u4e2d\u306b\u6e2c\u5b9a\u3055\u308c\u305fAl\u30b7\u30b0\u30ca\u30eb\u30d4\u30fc\u30af\u306e\u6bd4\u8f03\u3002\u30d4\u30fc\u30af\u306e\u9ad8\u3055\uff08SAl,max,height@TMA\uff09\u304a\u3088\u3073\u5e45\uff08SAl,max,width@TMA\uff09\u306e\u5909\u52d5\u306f\u3001\u4f9b\u7d66\u3055\u308c\u305f\u30ac\u30b9\u524d\u99c6\u4f53\u306e\u5909\u52d5\u91cf\u3092\u793a\u3057\u3001\u3057\u305f\u304c\u3063\u3066\u30b5\u30a4\u30af\u30eb\u9593\u306eALD\u30d7\u30ed\u30bb\u30b9\u306e\u518d\u73fe\u6027\u3092\u793a\u3059\u3002.<\/em><\/figcaption><\/figure>\n<\/div>\n\n\n

\u7d50\u8ad6<\/h2>\n\n\n\n

\u3053\u306e\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30ce\u30fc\u30c8\u3067\u7d39\u4ecb\u3055\u308c\u3066\u3044\u308b\u3088\u3046\u306b\u3001ALD\u30b7\u30b9\u30c6\u30e0\u306bSemicon Process\u30a2\u30ca\u30e9\u30a4\u30b6\u30fc\u3092\u7d44\u307f\u8fbc\u3080\u3053\u3068\u3067\u3001\u30a4\u30aa\u30f3\u5316\u3057\u305f\u3059\u3079\u3066\u306e\u5206\u5b50\u3068\u30d5\u30e9\u30b0\u30e1\u30f3\u30c8\u3092\u540c\u6642\u306b\u30ea\u30a2\u30eb\u30bf\u30a4\u30e0\u3067\u691c\u51fa\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002\u3057\u305f\u304c\u3063\u3066\u3001\u6700\u9069\u306a\u30d7\u30ed\u30bb\u30b9\u304b\u3089\u306e\u9038\u8131\u3084\u6545\u969c\u3092\u65e9\u671f\u306b\u691c\u51fa\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u3001\u305d\u306e\u7d50\u679c\u3001\u30d7\u30ea\u30ab\u30fc\u30b5\u30fc\u6e29\u5ea6\u3001\u30d1\u30eb\u30b9\u6642\u9593\u3001\u5727\u529b\u306a\u3069\u306e\u6210\u819c\u30d1\u30e9\u30e1\u30fc\u30bf\u3092\u76f4\u3061\u306b\u4fee\u6b63\u3057\u3066\u3001\u610f\u56f3\u3057\u305f\u8584\u819c\u5316\u5b66\u69cb\u9020\u306e\u6210\u819c\u3092\u78ba\u5b9f\u306b\u3059\u308b\u3053\u3068\u304c\u3067\u304d\u307e\u3059\u3002.<\/p>\n\n\n\n

ALD\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308bin situ Semicon Process\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306e\u5229\u70b9\u306f\u3001\u5316\u5b66\u6c17\u76f8\u6210\u9577\u306a\u3069\u306e\u4ed6\u306e\u6210\u819c\u6280\u8853\u3084\u3001\u30d7\u30ed\u30bb\u30b9\u306e\u6700\u9069\u5316\u3001\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u3001\u5236\u5fa1\u306e\u305f\u3081\u306e\u30a8\u30c3\u30c1\u30f3\u30b0\u30fb\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u306b\u3082\u5e83\u304c\u308b\u3060\u308d\u3046\u3002\u30a8\u30f3\u30c9\u30dd\u30a4\u30f3\u30c8\u691c\u51fa\u306f\u3001\u4e8c\u5143\u5408\u91d1\u3001\u4e09\u5143\u5408\u91d1\u3001\u56db\u5143\u5408\u91d1\u3092\u542b\u3080\u9077\u79fb\u306e\u3088\u3046\u306a\u8907\u96d1\u306a\u754c\u9762\u306b\u3082\u5b9f\u88c5\u3067\u304d\u308b\u3002\u3055\u3089\u306b\u3001\u9ad8\u3044\u53d6\u5f97\u901f\u5ea6\u306f\u3001\u30d1\u30eb\u30b9\u30e2\u30fc\u30c9\u3067\u52d5\u4f5c\u3059\u308b\u30bd\u30fc\u30b9\u3084\u3001\u30ca\u30ce\u30ec\u30a4\u30e4\u30fc\u30b9\u30bf\u30c3\u30af\u306e\u84b8\u7740\u3084\u30a8\u30c3\u30c1\u30f3\u30b0\u3092\u542b\u3080\u30d7\u30ed\u30bb\u30b9\u306b\u3068\u3063\u3066\u91cd\u8981\u3067\u3042\u308b\u3002 Semicon Process\u30bd\u30ea\u30e5\u30fc\u30b7\u30e7\u30f3\u306f\u3001\u8907\u96d1\u306a\u30ac\u30b9\u74b0\u5883\u4e2d\u306e\u5316\u5b66\u7a2e\u3092\u6b63\u78ba\u306b\u5272\u308a\u5f53\u3066\u3001\u305d\u306e\u6642\u9593\u5909\u5316\u3092\u6e2c\u5b9a\u3059\u308b\u5fc5\u8981\u304c\u3042\u308b\u3001\u4ed6\u306e\u534a\u5c0e\u4f53\u30d7\u30ed\u30bb\u30b9\u306b\u304a\u3051\u308b\u30e2\u30cb\u30bf\u30ea\u30f3\u30b0\u30c4\u30fc\u30eb\u3068\u3057\u3066\u5e83\u304f\u5fdc\u7528\u3067\u304d\u307e\u3059\u3002.   <\/p>\n\n\n\n

\u8b1d\u8f9e
<\/strong>EMPA Eidg\uff08\u30c8\u30a5\u30fc\u30f3\uff09\u3068Swiss Cluster\uff08\u30c8\u30a5\u30fc\u30f3\uff09\u306b\u306f\u3001\u672c\u30a2\u30d7\u30ea\u30b1\u30fc\u30b7\u30e7\u30f3\u30ce\u30fc\u30c8\u306e\u30c7\u30fc\u30bf\u53ce\u96c6\u3068\u5206\u6790\u306b\u3054\u5354\u529b\u3044\u305f\u3060\u3044\u305f\u3002.<\/p>","protected":false},"excerpt":{"rendered":"

Ben BensaoulaTOFWERK Switzerland Introduction Atomic layer deposition (ALD) is rapidly becoming a standard technique for a wide range of thin film materials and is an essential tool in the semiconductor sector. ALD relies on self-limiting surface reactions of two gaseous reactants in sequential mode to obtain sub-nanometer control of the thickness and conformity of a thin film, even on substrates with complex 3D geometries. The physicochemical properties of the deposited films depend mainly on surface decomposition reactions and growth mechanisms. Therefore, it is important to fully characterize and understand these processes and utilize metrology tools that shorten the process optimization cycle and provide real-time monitoring and control in a production … \u7d9a\u304d\u3092\u8aad\u3080<\/a><\/p>","protected":false},"author":3,"featured_media":27576,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_acf_changed":false,"footnotes":""},"categories":[118],"tags":[],"product_notes":[345],"class_list":["post-27557","post","type-post","status-publish","format-standard","has-post-thumbnail","hentry","category-application-note","product_notes-semicon-process"],"acf":[],"yoast_head":"\nMonitoring and Characterization of Atomic Layer Deposition Processes<\/title>\n<meta name=\"description\" content=\"Incorporating ClearFab Process Solutions within an atomic layer deposition system allows for simultaneous, real-time detection of all ionized molecules and fragments.\" \/>\n<meta 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