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Join TOFWERK at Ultrapure Micro 2023

Join us in Austin, TX from October 10 – 12, 2023 for Ultrapure Micro (UPM) 2023. Experience innovative networking sessions with traditional technical content; UPM 2023 will explore the latest trends in high purity environments and micro contamination challenges within semiconductor fabrication facilities.

TOFWERK Ultrapure Micro 2023 Presentation

Thursday, October 12, 1:45pm
Talk: Online Monitoring of Traditional & Emerging Airborne Molecular Contaminants at pptv Concentrations, Dr. Carla Frege, TOFWERK

Full Ultrapure Micro Program

Highlighted Products at Ultrapure Micro 2023

Semiconductor AMC Solutions

Ultra fast. Ultra sensitive. Our AMC Monitoring Solutions allow you to monitor known and emerging contaminants from diverse molecular categories in real time. AMC Monitoring provides robust and simultaneous measurements of multiple AMC categories using fast-switching, highly sensitive time-of-flight chemical ionization mass spectrometry. 

Semiconductor Process Solutions

With a rugged and flexible configuration, our Process Monitoring Solutions use electron ionization time-of-flight mass spectrometry to simultaneously detect and analyze all precursors, byproducts, and trace species in real time. Equipped with powerful, high-speed software, our process analyzers are designed to handle challenging process requirements and enable fast, non-intrusive detection of process deviations in semiconductor processes. 

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