Complete AMC Control
Comprehensive, fast and sensitive AMC monitors.
Ultra-fast and ultra-sensitive,
real-time AMC monitors.
Monitor known and emerging contaminants from diverse molecular categories, sensitively, accurately, and reliably.
Conventional AMC monitoring solutions often require multiple sensors to adequately measure a full list of compounds requiring monitoring. ClearFab AMC Monitors provide robust and simultaneous measurements of multiple AMC categories, with a single solution.
|AMC||CAS||Molecule||2s LOD (ppbv)||1min LOD (ppbv)
|Propylene glycol methyl ether acetate (PGMEA)||108-65-6||C6H12O3||0.0065||0.0012|
|Propylene glycol methyl ether (PGME)||107-98-2||C4H10O2||0.052||0.0094|
|Methyl Ethyl Ketone (MEK)||78-93-3||C4H8O||0.421||0.075|
|Ethyl Acetate (EA)||141-78-6||C4H8O2||0.104||0.019|
Comprehensive contamination control throughout the fab.
The transport of Front Opening Unified Pods from process to process presents one of the greatest contamination risks in the fab. FOUP cleaning is limited by the sensitivity, speed and coverage of AMC screening.
Semiconductor manufacturing consists of many independent processes. To catch early-stage contamination events, sensitive AMC monitoring is a critical component of fab infrastructure.
ClearFab AMC Monitors offer unique versatility allowing easy deployment in the different fab environments. ClearFab AMC Monitors provide in-situ mobile measurement for accurate AMC control and leak detection of specific important for sticky and reactive contaminants.
Immediate Hazard Detection
Material off-gassing in an ISO 5 microtechnology cleanroom.
Material was purged with CDA and measured directly. Each time series shows simultaneous compound measurements with 3 different ionization chemistries.