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Complete AMC Control
Comprehensive, fast and sensitive AMC monitors.
Ultra-fast and ultra-sensitive,
real-time AMC monitors.
Monitor known and emerging contaminants from diverse molecular categories, sensitively, accurately, and reliably.
Conventional AMC monitoring solutions often require multiple sensors to adequately measure a full list of compounds requiring monitoring. ClearFab AMC Monitors provide robust and simultaneous measurements of multiple AMC categories, with a single solution.
Real-time Measurements
Quickly detect and react to early stage contamination events.
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Robust Coverage
Ultra-fast, simultaneous measurements of Acids, Bases, Condensables, and VOCs.
Single digit, part-per-trillion LODs
Sensitive detection for the lowest concentrations.
| AMC | CAS | Molecule | 2s LOD (ppbv) | 1min LOD (ppbv) |
|---|---|---|---|---|
| Propylene glycol methyl ether acetate (PGMEA) | 108-65-6 | C6H12O3 | 0.0065 | 0.0012 |
| Propylene glycol methyl ether (PGME) | 107-98-2 | C4H10O2 | 0.052 | 0.0094 |
| Methyl Ethyl Ketone (MEK) | 78-93-3 | C4H8O | 0.421 | 0.075 |
| Ethyl Acetate (EA) | 141-78-6 | C4H8O2 | 0.104 | 0.019 |
| Cyclopentane | 287-92-3 | C5H10 | 0.132 | 0.023 |
| Acetone | 67-64-1 | C3H6O | 0.002 | 0.0009 |
| Toluene | 108-88-3 | C7H8 | 0.012 | 0.003 |
| Ammonia | 7664-41-7 | NH3 | 0.408 | 0.072 |
| Hydrogen fluoride | 7664-39-3 | HF | 0.011 | 0.0002 |
| Hydrochloric acid | 132228-87-6 | HCl | 0.526 | 0.095 |
| Nitric acid | 7697-37-2 | HNO3 | 0.0072 | 0.0013 |
| Chlorine | 7782-50-5 | Cl2 | 0.001 | 0.0002 |
Comprehensive contamination control throughout the fab.
FOUP Monitoring
The transport of Front Opening Unified Pods from process to process presents one of the greatest contamination risks in the fab. FOUP cleaning is limited by the sensitivity, speed and coverage of AMC screening.
Facility Monitoring
Semiconductor manufacturing consists of many independent processes. To catch early-stage contamination events, sensitive AMC monitoring is a critical component of fab infrastructure.
Mobile Analysis
ClearFab AMC Monitors offer unique versatility allowing easy deployment in the different fab environments. ClearFab AMC Monitors provide in-situ mobile measurement for accurate AMC control and leak detection of specific important for sticky and reactive contaminants.
Immediate Hazard Detection
Material off-gassing in an ISO 5 microtechnology cleanroom.
Material was purged with CDA and measured directly. Each time series shows simultaneous compound measurements with 3 different ionization chemistries.
Ammonia and toluene leak detected in an ISO 5 fine chemistry cleanroom.
The ClearFab team is a proud member of the SEMI association. This industry group unites the entire electronics manufacturing and design supply chain through programs, member initiatives, market research, and advocacy.
