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The fibTOF enables sensitive 3D chemical imaging with nanometer resolution
Add FIB-SIMS capabilities to commercial FIB-SEM microscopes for powerful secondary ion imaging and depth profiling
Overview
Method
Specifications
Publications
Resources
Overview
Advantages of the fibTOF
The fibTOF adds focused ion beam secondary ion mass spectrometry (FIB-SIMS) capabilities to FIB-SEM microscopes, enabling sensitive chemical imaging in three dimensions with nanometer resolution.
- 3D chemical imaging of all elements with lateral resolution <50 nm and depth profiling resolution <10 nm
- Sensitive detection of low-mass elements such as hydrogen, boron, lithium and fluorine
- Isotopic imaging for experiments to study transport, diffusion or reaction mechanisms
- Unambiguous elemental identification with high mass resolving power
- Compatible with major commercial FIB-SEM microscopes with no impact on image quality
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Webinar: fibTOF -Bringing New Capabilities to FIB-SEM Research
‘Method
Advancing FIB-SIMS without Compromise
The fibTOF adds 3D chemical imaging to FIB-SEM microscopes
Secondary ion mass spectrometry (SIMS) is a well-established technique in which an energetic beam of ions is used to sputter a sample, leading to ejection of both neutral and charged particles (secondary ions). Sputtered ions are measured by a mass analyzer, providing chemical information about the sample. SIMS has high depth resolution (the secondary ions come only from the surface of the sample) and excellent lateral resolution when a suitably fine primary ion beam is scanned across the sample.
Adding the fibTOF to a FIB-SEM microscope enables SIMS measurements with excellent imaging performance without compromising SEM/EDX measurements. The fibTOF’s time-of-flight mass analyzer always acquires a complete mass spectrum, enabling visualization of any ions of interest during post-processing of the data.
Specifications
fibTOF Specifications
The fibTOF is compatible with major commercial FIB-SEM microscopes with no impact on image quality
Mass Resolving Power M/ΔM FWHM | Mass Range (Th) | Limit of Detection | Lateral Spatial Resolution* | Depth Resolution* |
|---|---|---|---|---|
| >700 | 1 – 500 | ppm | 50 nm | 10 nm |
*Depends on the focused ion beam performance
Publications
fibTOF Publications
2021
- Priebe et al. Sensitivity of Fluorine Gas-Assisted FIB-TOF-SIMS for Chemical Characterization of Buried Sublayers in Thin Films. ACS Applied Materials & Interfaces, 2021. DOI: 10.1021/acsami.1c01627
- Wieczerzak, K.; Priebe, A.; Utke, I.; Michler, J. Practical Aspects of Focused Ion Beam Time-of-Flight Secondary Ion Mass Spectrometry Analysis Enhanced by Fluorine Gas Coinjection. Chemistry of Materials, 2021. DOI: 10.1021/acs.chemmater.1c00052
- Pillatsch L.; Kalácska, S.; Maeder, X.; Michler, J. In Situ Atomic Force Microscopy Depth-Corrected Three-Dimensional Focused Ion Beam Based Time-of-Flight Secondary Ion Mass Spectroscopy: Spatial Resolution, Surface Roughness, Oxidation. Microscopy and Microanalysis, 2021. In Focus | DOI: 10.1017/S1431927620024678
2020
- Sastre et al. Lithium Garnet Li7La3Zr2O12 Electrolyte for All‐Solid‐State Batteries: Closing the Gap between Bulk and Thin Film Li‐Ion Conductivities. Advanced Materials Interfaces, 2020. DOI: 10.1002/admi.202000425
- Priebe et al. Elemental characterization of Al nanoparticles buried under a Cu thin film – TOF-SIMS vs. STEM/EDX. Analytical Chemistry, 2020. DOI: 10.1021/acs.analchem.0c02361
2019
- Pillatsch, L.; Östlund, F.; Michler, J. FIBSIMS: A review of secondary ion mass spectrometry for analytical dual beam focussed ion beam instruments, Progress in Crystal Growth and Characterization of Materials, 2019. In Focus | DOI: 10.1016/j.pcrysgrow.2018.10.001
- Jiao, C.; Pillatsch, L.; Mulders, J.; Wall, D. Three-Dimensional Time-of-Flight Secondary Ion Mass Spectrometry and DualBeam FIB/SEM Imaging of Lithium-ion Battery Cathode. Microscopy and Microanalysis, 2019. DOI: 10.1017/S1431927619005117
Priebe et al. 3D Imaging of Nanoparticles in an Inorganic Matrix Using TOF-SIMS Validated with STEM and EDX. Analytical Chemistry, 2019. DOI: 10.1021/acs.analchem.9b02545
2014
- Stevie et al. FIB-SIMS quantification using TOF-SIMS with Ar and Xe plasma sources. Surface and Interface Analysis, 2014.
DOI: 10.1002/sia.5483
2012
- Whitby et al. High Spatial Resolution Time-of-Flight Secondary Ion Mass Spectrometry for the Masses: A Novel Orthogonal ToF FIB-SIMS Instrument with In Situ AFM. Advances in Materials Science and Engineering, 2012. DOI: 10.1155/2012/180437
Resources
Application Notes
Knowledge
- An Introduction to FIB-SIMS Using the fibTOF
- Advantages of Time-of-Flight Mass Spectrometry Over Quadrupole MS
TOFWERK Publications
- Improved Automation of SIMS Measurements Using a fibTOF with an In Situ AFM
- FIB-SIMS Review Reveals fibTOF as Preferred Tool in a Growing List of Application Fields
Webinars
Product Information
The fibTOF team is a proud member of the fit4nano community. This group connects partners from academia and industry to further the development and application of Focused Ion Beam (FIB) technology.
3D Chemical Imaging
fibTOF data set showing the distribution of aluminum ions in the top layers of a vertical cavity surface emitting laser. The vertical scale has been exaggerated, and corresponds to a depth of less than 2 microns. The field of view is 10 x 10 microns. Image provided by Empa, the Swiss Federal Laboratories for Materials Science and Technology.
Compatible With Major Commercial FIB-SEM Microscopes
