Chemical Imaging at the Nanoscale
Incorporate FIB-SIMS capabilities to your commercial FIB-SEM microscope for advanced depth profiling and secondary ion imaging
fibTOF Specifications
The integration of the fibTOF with major commercial FIB-SEM microscopes preserves high-quality imaging performance.
Mass Resolving Power M/ΔM FWHM | Mass Range (Th) | Limit of Detection | Lateral Spatial Resolution* | Depth Resolution* |
|---|---|---|---|---|
| >700 | 1 – 500 | ppm | 50 nm | 10 nm |
*Depends on the focused ion beam performance
