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Complete AMC Control

Comprehensive, fast and sensitive AMC monitoring.

Specifications and Limits of Detection

The TOFWERK Semicon AMC Monitor provides the ideal solution for simultaneous monitoring of Acids, Bases, Condensables, and VOCs. Using TOFWERK’s patented fast polarity switching and the Aim Reactor, each compound class is reported simultaneously in millisecond timescale with limited fragmentation. Accessories are available for use in a variety of AMC monitoring applications.

Limits of Detection

LODs for representative compounds

AMCCASMolecule2s LOD (ppbv)1min LOD (ppbv)
Propylene glycol methyl ether acetate (PGMEA)108-65-6C6H12O30.00650.0012
Propylene glycol methyl ether (PGME)107-98-2C4H10O20.0520.0094
Methyl Ethyl Ketone (MEK)78-93-3C4H8O0.4210.075
Ethyl Acetate (EA)141-78-6C4H8O20.1040.019
Cyclopentane287-92-3C5H100.1320.023
Acetone67-64-1C3H6O0.0020.0009
Toluene108-88-3C7H80.0120.003
Ammonia 7664-41-7 NH30.4080.072
Hydrogen fluoride7664-39-3HF0.0110.0002
Hydrochloric acid132228-87-6HCl0.5260.095
Nitric acid7697-37-2HNO30.00720.0013
Chlorine7782-50-5Cl20.0010.0002

For help identifying LODs contact us.

System Specifications

Library User Defined
Concentration Range ppqv-100 ppbv
Resolution >1000 M/ΔM
Limits of Detection 1-50 pptv
Analysis Cycle 40 kHz
Mode Switching 5 Hz
Operating Temperature 10-40°C
Operating Humidity <90%
Certification CE

Certification: CE, Semi S2 Compatible

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