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Complete AMC Control

Comprehensive, fast and sensitive AMC monitoring.

Specifications and Limits of Detection

TOFWERK Semicon AMC Monitors come in two  configurations which can be utilized individually or jointly. Accessories are available for use in a variety of AMC monitoring applications.

ABC Configuration

The ideal solution for simultaneous monitoring of Acids, Bases, Condensables, and some VOCs. Using TOFWERK’s patented fast polarity switching and Aim Reactor, each compound class is reported simultaneously in millisecond timescale with limited fragmentation.

ABC LODs (pptv 1 min) for representative compounds

SubstanceFormulaLOD (pptv 1 min)
Hydrofluoric acidHF10
Nitric acidHNO₃5
Acetic acidHCOOH10
AmmoniaNH₃10
Dimethylamine (DMA)(CH₃)₂NH5
Propylene glycol methyl ether acetate (PGMEA)C6H12O35
TolueneC7H85

For help identifying LODs contact us.

VOC Configuration

Comprehensive monitoring for Volatile Organic Compounds. Compared to the ABC Configuration, the VOC configuration provides more robust measurements of VOCs using PTR mass spectrometry with pptV limits of detection.

VOC LODs (pptv 1 min) for representative compounds

SubstanceFormulaLOD (pptv 1 min)
BenzeneC6H66.1
Isopropyl alcohol (IPA)C3H8O9.6
Propylene glycol methyl ether acetate (PGMEA)C6H12O313.1
Ethyl acetate (EA)C4H8O211.4
Propylene glycol methyl ether (PGME)C4H10O213
CyclopentaneC5H1010

For help identifying LODs contact us.

System Specifications

Library User Defined
Concentration Range ppqv-100 ppbv
Resolution >1000 M/ΔM
Limits of Detection 1-50 pptv
Analysis Cycle 40 kHz
Mode Switching 5 Hz
Operating Temperature 10-40°C
Operating Humidity <90%
Certification CE

Limits of Detection

AMCCASMolecule2s LOD (ppbv)1min LOD (ppbv)
Propylene glycol methyl ether acetate (PGMEA)108-65-6C6H12O30.00650.0012
Propylene glycol methyl ether (PGME)107-98-2C4H10O20.0520.0094
Methyl Ethyl Ketone (MEK)78-93-3C4H8O0.4210.075
Ethyl Acetate (EA)141-78-6C4H8O20.1040.019
Cyclopentane287-92-3C5H100.1320.023
Acetone67-64-1C3H6O0.0020.0009
Toluene108-88-3C7H80.0120.003
Ammonia 7664-41-7 NH30.4080.072
Hydrogen fluoride7664-39-3HF0.0110.0002
Hydrochloric acid132228-87-6HCl0.5260.095
Nitric acid7697-37-2HNO30.00720.0013
Chlorine7782-50-5Cl20.0010.0002

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