Specifications and Limits of Detection
The TOFWERK Semicon AMC Monitor provides the ideal solution for simultaneous monitoring of Acids, Bases, Condensables, and VOCs. Using TOFWERK’s patented fast polarity switching and the Aim Reactor, each compound class is reported simultaneously in millisecond timescale with limited fragmentation. Accessories are available for use in a variety of AMC monitoring applications.
Limits of Detection
LODs for representative compounds
AMC | CAS | Molecule | 2s LOD (ppbv) | 1min LOD (ppbv) |
---|---|---|---|---|
Propylene glycol methyl ether acetate (PGMEA) | 108-65-6 | C6H12O3 | 0.0065 | 0.0012 |
Propylene glycol methyl ether (PGME) | 107-98-2 | C4H10O2 | 0.052 | 0.0094 |
Methyl Ethyl Ketone (MEK) | 78-93-3 | C4H8O | 0.421 | 0.075 |
Ethyl Acetate (EA) | 141-78-6 | C4H8O2 | 0.104 | 0.019 |
Cyclopentane | 287-92-3 | C5H10 | 0.132 | 0.023 |
Acetone | 67-64-1 | C3H6O | 0.002 | 0.0009 |
Toluene | 108-88-3 | C7H8 | 0.012 | 0.003 |
Ammonia | 7664-41-7 | NH3 | 0.408 | 0.072 |
Hydrogen fluoride | 7664-39-3 | HF | 0.011 | 0.0002 |
Hydrochloric acid | 132228-87-6 | HCl | 0.526 | 0.095 |
Nitric acid | 7697-37-2 | HNO3 | 0.0072 | 0.0013 |
Chlorine | 7782-50-5 | Cl2 | 0.001 | 0.0002 |
For help identifying LODs contact us.
System Specifications
Library | User Defined |
Concentration Range | ppqv-100 ppbv |
Resolution | >1000 M/ΔM |
Limits of Detection | 1-50 pptv |
Analysis Cycle | 40 kHz |
Mode Switching | 5 Hz |
Operating Temperature | 10-40°C |
Operating Humidity | <90% |
Certification | CE |
Certification: CE, Semi S2 Compatible