Complete Process Control
Process analyzers for R&D and production environments in etch, deposition and lithography processes.
Specifications
| Mass Resolving Power | From 500 to 8,000 Th/Th |
| Mass Range | >1,000 Th |
| Mass Accuracy | Down to 5 ppm |
| Limits of Detection | 1.50E*12 mbar (≤ 0.3 ppb) sensitivity for most elements @ 1kHz acquisition rate |
| Dynamic Range | > 105 |
| Max Spectra Rate/TOF extration Rate | 1 kHz/> 30 kHz |
| Corrosion Resistant | Yes |
Semicon Process Analyzers are available in different configurations. Accessories can be selected to address specific fab applications.
Process Analyzer for Gases
Solution configuration best suited for the analysis and monitoring of neutral species present in semiconductor processes with ppm sensitivity and millisecond sampling rates.
Accessories
- Manifold valve for cluster applications or similar
- Inlet manifold allowing measurements at different process pressure ranges
