Join us in Phoenix, AZ on September 28 – 30 2022 for Ultrapure Micro (UPM) 2022.
With innovative networking sessions with traditional technical content, UPM 2022 will explore the latest trends in high purity environments and micro contamination challenges within semiconductor fabrication facilities.
TOFWERK Ultrapure Micro Presentation
Thursday, September 30, 11:00-12:00
Session: Yield and Reliability
Real time AMC monitoring with novel chemical ionization mass spectrometry at single digit pptv concentrations, Carla Frege, TOFWERK
