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Join TOFWERK at the International Symposium on Sputtering and Plasma Processes

TOFWERK is excited to participate in the International Symposium on Sputtering and Plasma Processes (ISSP) from July 2 – 5, 2024 in Kyoto, Japan.

The International Symposium on Sputtering and Plasma Processes (ISSP), established in 1991, held its 1st symposium in Tokyo, focusing on “Reactive Sputtering” and addressing new approaches to enhance deposition rate and stability. Since then, the symposium has been biennial, with each event emphasizing current topics and trends in sputtering and plasma processes.

TOFWERK Presentation at ISSP

This talk will focus on the merits of time-of-flight (TOF) mass spectrometry technology for fast, sensitive, and comprehensive monitoring in environmental, material science, and semiconductor applications. It will highlight TOFWERK TOF mass spectrometers, including the icpTOF, fibTOF, Semicon AMC Monitor, and the Semicon Process Analyzer

Thursday, July 4, 2024
11:50 AM–12:10 PM JST

Talk: Time-of-Flight Technology for Environmental, Material Science, and Semiconductor Applications, Dr. Marc Gonin, TOFWERK

Highlighted Products at ISSP 2024


All the elements.  All the time. 
The TOFWERK icpTOF is an inductively coupled plasma mass spectrometer (ICP-MS) that couples the source and interface hardware of a Thermo Scientific iCAP RQ to a TOFWERK TOF mass analyzer.  With high-speed mass spectral acquisition and simultaneous analysis of all isotopes, the icpTOF is the ideal ICP-MS detector for multi-element single particle analysis and laser ablation imaging. 

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fibTOF Product Image

Advancing FIB-SIMS without compromise.
The TOFWERK fibTOF adds focused ion beam secondary ion mass spectrometry (FIB-SIMS) capabilities to FIB-SEM microscopes, enabling sensitive chemical imaging in three dimensions with nanometer resolution. 

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Semicon AMC

Complete AMC control.
The TOFWERK Semicon AMC Monitor allows you to monitor known and emerging contaminants from diverse molecular categories in real time. This AMC monitoring solution provides robust and simultaneous measurements of multiple AMC categories using fast-switching, highly sensitive time-of-flight chemical ionization mass spectrometry. 

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Semicon Process Solution

Rugged and flexible process monitoring and control.
The TOFWERK Semicon Process Analyzer  uses electron ionization time-of-flight mass spectrometry to simultaneously detect and analyze all precursors, byproducts, and trace species in real time. Equipped with powerful, high-speed software, this process solution is designed to handle challenging requirements and enable fast, non-intrusive detection of process deviations in semiconductor processes.  

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Semiconductor AMC Solutions

Semiconductor Process Solutions