Depth Profile Analyses with Sub 100-nm Depth Resolution of a Metal Thin Film by Femtosecond – Laser Ablation – Inductively Coupled Plasma – Time-of-Flight Mass Spectrometry
Debora Käser, Lyndsey Hendriks, Joachim Koch, Detlef Günther
스펙트로키미카 액타 파트 B: 원자 분광학, 2018
DOI:10.1016/j.sab.2018.08.002
In this publication, Debora Käser and coworkers demonstrate an innovative way to achieve a homogenized beam from a femtosecond laser beam in a laser ablation/ icpTOF prototype system. This homogenization scheme leads to uniform ablation within the laser spot and to improved depth resolution of laser ablation – inductively coupled plasma – time-of-flight mass spectrometry (LA-ICP-TOFMS).
When analyzing the depth profile of a Cr/Ni metal thin film, the depth resolution was found to be better than 100 nm. This resolution suggests LA-ICP-TOFMS could be a complementary technology to secondary ion mass spectrometry or glow discharge optical emission spectrometry for depth profiling due to its higher speed and lateral resolution in combination with high sensitivity.
